JPH0729640Y2 - ウェーハ容器の底部緩衝板 - Google Patents

ウェーハ容器の底部緩衝板

Info

Publication number
JPH0729640Y2
JPH0729640Y2 JP18823287U JP18823287U JPH0729640Y2 JP H0729640 Y2 JPH0729640 Y2 JP H0729640Y2 JP 18823287 U JP18823287 U JP 18823287U JP 18823287 U JP18823287 U JP 18823287U JP H0729640 Y2 JPH0729640 Y2 JP H0729640Y2
Authority
JP
Japan
Prior art keywords
wafer
elastic piece
side walls
side wall
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18823287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0192137U (en]
Inventor
忠三郎 大塚
敏夫 清水
敏嗣 矢島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP18823287U priority Critical patent/JPH0729640Y2/ja
Publication of JPH0192137U publication Critical patent/JPH0192137U/ja
Application granted granted Critical
Publication of JPH0729640Y2 publication Critical patent/JPH0729640Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP18823287U 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板 Expired - Lifetime JPH0729640Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18823287U JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18823287U JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Publications (2)

Publication Number Publication Date
JPH0192137U JPH0192137U (en]) 1989-06-16
JPH0729640Y2 true JPH0729640Y2 (ja) 1995-07-05

Family

ID=31479338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18823287U Expired - Lifetime JPH0729640Y2 (ja) 1987-12-10 1987-12-10 ウェーハ容器の底部緩衝板

Country Status (1)

Country Link
JP (1) JPH0729640Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
US5273159A (en) * 1992-05-26 1993-12-28 Empak, Inc. Wafer suspension box
CN102017118B (zh) * 2008-04-25 2013-03-06 信越聚合物株式会社 保持器及包括保持器的基板收纳容器
JP6068096B2 (ja) * 2012-11-02 2017-01-25 信越ポリマー株式会社 ウェーハカセットの梱包体

Also Published As

Publication number Publication date
JPH0192137U (en]) 1989-06-16

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